{"product_id":"75430","title":"Mattson Aspen III ICPHT Asher \/ Stripper","description":"Mattson Aspen III ICPHT Asher \/ Stripper\u003cbr\u003e- HDD not included\u003cbr\u003e- Process chamber : 2\u003cbr\u003e- FI: 1\u003cbr\u003e- Transfer module: Upper\/lower arm 1\u003cbr\u003e- AC power box: Arm1\/Arm2 2\u003cbr\u003e- Transfer module: Arm1\/Arm2 1\u003cbr\u003e- ATM Robot: 1\u003cbr\u003e- VTM Robot: 1\u003cbr\u003e- ATM\/VTM ROBOT control: PMAC\u003cbr\u003e- MFC Gas 1 (O2-10SLM): 2\u003cbr\u003e- MFC Gas 2 (CF4- 50 SCCM): 2\u003cbr\u003e- MFC Gas 3 (H2\/N2-1SLM): 2\u003cbr\u003e- MFC Gas 4 (N2-2SLM): 2\u003cbr\u003e- APC(valve + control): KALREZ 8085 2\u003cbr\u003e- Gauge: MYKROLIS 2\u003cbr\u003e- EPD Controller: EP200Mmd 8\u003cbr\u003e- Heater Module: WATLOW 2\u003cbr\u003e- Heater Module: Eurotherm 2\u003cbr\u003e- RF gen. model: RFG 3001+13.56 MHz+3000 W 8\u003cbr\u003e- Match: 8\u003cbr\u003e- LCD Monitor: 2\u003cbr\u003e- Electric \u0026amp; signal cable Length: estimated around 8M\u003cbr\u003eSpecification:\u003cbr\u003e1.Main Body\u003cbr\u003e1-1 Load Port Brooks\u003cbr\u003e1-2 Number of load port 4 Load ports\u003cbr\u003e2.Chamber\u003cbr\u003e2-1 Bottom Temp Control ±5℃(in wafer)\u003cbr\u003e2-2 End Point Detector Yes\u003cbr\u003e2-3 Chamber Heating Control Type WATLOW\u003cbr\u003e2-4 Temp Control Range 80℃∼300℃\u003cbr\u003e2-5 Pre-Heat Function NO\u003cbr\u003e2-6 RF gen. model AE\u003cbr\u003e2-7RF gen. model 3KW\u003cbr\u003e3.System Controller\u003cbr\u003e3-1 CPU Pentium 4\u003cbr\u003e3-2 Hard disk 60GB+80GB\u003cbr\u003e3-3 Operation Monitor 15\" LCD\u003cbr\u003e3-4 Signal Tower Pole type\u003cbr\u003e4.Process Gas Line\u003cbr\u003e4-1 MFC Maker Aera\u003cbr\u003e4-2 GAS Box Tupe IGS Type\u003cbr\u003e4-3 Number of gas Line\u003cbr\u003eGAS #1 O2-10SLM\u003cbr\u003eGAS #2 CF4- 50 SCCM\u003cbr\u003eGAS #3 H2\/N2-1SLM\u003cbr\u003eGAS #4 N2-2SLM\u003cbr\u003e4-4 GAS box valve NUPRO\u003cbr\u003e4-5 GAS box regulator TESCOM\u003cbr\u003e4-6 GAS box pressure display SWAGELOK\u003cbr\u003e4-7 GAS box filter MYKROLIS\u003cbr\u003e5.Vacuum\u003cbr\u003e5-1 Pressure Control KALREZ 8085\u003cbr\u003e- Light tower is damaged\u003cbr\u003e2004 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44817089298622,"sku":"75430","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/205613-102.jpg?v=1737606249","url":"https:\/\/www.bridgetronic.com\/products\/75430","provider":"Bridge Tronic Global","version":"1.0","type":"link"}