Mattson Aspen III ICPHT Asher / Stripper
- HDD not included
- Process chamber : 2
- FI: 1
- Transfer module: Upper/lower arm 1
- AC power box: Arm1/Arm2 2
- Transfer module: Arm1/Arm2 1
- ATM Robot: 1
- VTM Robot: 1
- ATM/VTM ROBOT control: PMAC
- MFC Gas 1 (O2-10SLM): 2
- MFC Gas 2 (CF4- 50 SCCM): 2
- MFC Gas 3 (H2/N2-1SLM): 2
- MFC Gas 4 (N2-2SLM): 2
- APC(valve + control): KALREZ 8085 2
- Gauge: MYKROLIS 2
- EPD Controller: EP200Mmd 8
- Heater Module: WATLOW 2
- Heater Module: Eurotherm 2
- RF gen. model: RFG 3001+13.56 MHz+3000 W 8
- Match: 8
- LCD Monitor: 2
- Electric & signal cable Length: estimated around 8M
Specification:
1.Main Body
1-1 Load Port Brooks
1-2 Number of load port 4 Load ports
2.Chamber
2-1 Bottom Temp Control ±5℃(in wafer)
2-2 End Point Detector Yes
2-3 Chamber Heating Control Type WATLOW
2-4 Temp Control Range 80℃∼300℃
2-5 Pre-Heat Function NO
2-6 RF gen. model AE
2-7RF gen. model 3KW
3.System Controller
3-1 CPU Pentium 4
3-2 Hard disk 60GB+80GB
3-3 Operation Monitor 15" LCD
3-4 Signal Tower Pole type
4.Process Gas Line
4-1 MFC Maker Aera
4-2 GAS Box Tupe IGS Type
4-3 Number of gas Line
GAS #1 O2-10SLM
GAS #2 CF4- 50 SCCM
GAS #3 H2/N2-1SLM
GAS #4 N2-2SLM
4-4 GAS box valve NUPRO
4-5 GAS box regulator TESCOM
4-6 GAS box pressure display SWAGELOK
4-7 GAS box filter MYKROLIS
5.Vacuum
5-1 Pressure Control KALREZ 8085
- Light tower is damaged
2004 Vintage