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Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)

Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)

Asset #: 75415

Make: Hitachi

Model: CG 5000

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Hitachi CG 5000 CD-SEM (Critical Dimension Scanning Electron Microscope)
- Critical Dimension (CD) Measurement Scanning Electron Microscope (SEM)
- Ergonomics Modification
- 3 FOUP
- Resolution: 1.45nm with signal processing function.
- Measurement repeatability: 0.25nm (3sig)
- Throughput: 50wph (20 measurements/wafer), approximately 40%
higher than CG4000 series
- Signal Light Tower (with buzzer)
- UL Safety Modification (S2-0200)
- Circulator Input Voltage Modification
- Automatic Beam Alignment on wafer
- Optical magnification (x100 & x200)
- AC208V input modification
- Cable (15m) (for main unit thru power supply unit)
- SE-Gun back-up power supply unit
- Ion pump back-up power supply unit
- SPM (pre-focus only)
- Multi-point Measurement
- Image Filing Function
- Output function to DOS format FD
- Recipe queue
- ArF package (multi)
- Image info additional function to MSR file
- Waveform matching
- Image enhancement
- Mag. Max x400k
- Dry Pump I/F "F" (for IL70) (Pumps may not be included)
- GEM300
- DS/T-PC link connection license
- 100nm Microscale
- Grounded Arm
- FFU hood
- Flat Scan
-N2 Purge
- HDD not included
2004 Vintage

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