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Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper
Nikon NSR TFH i 14 DL i-Line Stepper

Nikon NSR TFH i 14 DL i-Line Stepper

Asset #: 75351

Make: Nikon

Model: NSR TFH i 14 DL

Wafer Sizes: 8 inch

Last Confirm Date: November 29, 2023

Nikon NSR TFH i 14 DL i-Line Stepper, 8"
- Hard disk: SSD
- MCSV basic: V3.46F
PC:
- OCS option: G3.45Q
- WINXP X64 / VMS7.2.1
- PC type: NEST-A
- Disk drive: SSD
- Illumination: UV- Lamp 5:1 NA 0.3-0.45 Variable, 0.5µm
Other:
- Wafer stage type: Air Bearing
- Field size: 22mm
- Wafer alignment: FIA / LSA
- Auto focus
- Wafer loader: WL3 / non contact pre-aligner / notched
- Control rack position: RHS
- Reticle loader: extended reticle library
- No PPD
- Barcode reader: Yes code 39
- Chamber temp: 20.5
- Chamber type: standard
- Lens data available
2011 Vintage

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