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EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner
EVG IQ Mask Aligner

EVG IQ Mask Aligner

Asset #: 75173

Make: EVG

Model: IQ

EVG IQ Mask Aligner
- Vintage EVG IQ aligner, 6 or 8" capable lithography system.
- Dual end effector robot handling configuration.
- Complete computer control for operator interface and alignment functions. Motors Encoders Limit switches Sensors Pneumatic Operating system:
- Automatic alignment for top and / or bottom side. Motorized alignment stage: Precision guided stage: X, Y, T alignment
- Reinforced stage drives: X/Y/Theta axis Internal wedge compensation unit: Automatic wedge compensation Substrate and mask.
- 500W or 1000W Hg lamps house Optical sets:
- Fully motorized split field microscope with high resolution CCD camera Monitored in process window.
- Actual travel range might be restricted by design of tooling:
- Joystick control of microscope positions (X, Y, Z) Display and storage of microscope positions with recipe (2) Objectives 5x (3.6x – 20x available) Bottom side microscope: Fully motorized split field microscope for bottom side viewing with high resolution CCD camera
- Motorized swivel arm Wafer loading trays required for desired wafer size ic devices.
2008 Vintage

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