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Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)
Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)

Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition)

Asset #: 75147

Make: Watkins Johnson (WJ)

Model: WJ 1000

Wafer Sizes: 8 inch

Last Confirm Date: August 12, 2024

Watkins Johnson (WJ) WJ 1000 AP-CVD (Atmospheric Pressure - Chemical Vapor Deposition), 8"
- BPSG and TEOS
- 3 Phase
Injector #1
- D2N2 : 6 SLM
- SiH4 : 200 sccm
- SepN2 : 20 SLM
- D1N2 : 10 SLM
- O2 : 500 sccm
Injector #2
- D2N2 : 6 SLM
- SiH4 : 200 sccm
- SepN2 : 20 SLM
- D1N2 : 10 SLM
- O2 : 500 sccm
Injector #3
- D2N2 : 6 SLM
- SiH4 : 200 sccm
- SepN2 : 20 SLM
- D1N2 : 10 SLM
- O2 : 500 sccm
Injector #4
- D2N2 :5 SLM
- SiH4 : 200 sccm
- SepN2 : 20 SLM
- D1N2 : 10 SLM
- O2 : 500 sccm
Includes:
- Generator
- Scrub
- Liquid sources
- Extra injector

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