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SCREEN / DNS SS W 80 A-AR Wafer Scrubber
SCREEN / DNS SS W 80 A-AR Wafer Scrubber
SCREEN / DNS SS W 80 A-AR Wafer Scrubber
SCREEN / DNS SS W 80 A-AR Wafer Scrubber
SCREEN / DNS SS W 80 A-AR Wafer Scrubber
SCREEN / DNS SS W 80 A-AR Wafer Scrubber
SCREEN / DNS SS W 80 A-AR Wafer Scrubber
SCREEN / DNS SS W 80 A-AR Wafer Scrubber
SCREEN / DNS SS W 80 A-AR Wafer Scrubber

SCREEN / DNS SS W 80 A-AR Wafer Scrubber

Asset #: 75078

Make: SCREEN / DNS

Model: SS W 80 A-AR

Wafer Sizes: 8 inch

Last Confirm Date: November 19, 2025

SCREEN / DNS SS W 80 A-AR Wafer Scrubber, 8"
System Composition:
- Main Body
- Nano Spray Unit
- UFF (optional, if requested)
- Down Transformer (optional, if requested)
General Specifications:
- Wafer Type: Notch
- Thickness: 725 ± 25 µm / 75 µm
- Diameter: 200 ± 0.2 µm
- Main Power: 1Φ 208V / 3.2K / 3A / 108V / 4.5K / 16A
- Utility Requirements: DI, Air, VAC, EXH, N2
- Weight: 1800 kg
- Brush Type: Normal Brush
- Nozzles: Nano Spray Nozzle, Rinse Nozzle 1 & 2, Back Rinse Nozzle
System / Controller:
- Controller: NEC FC-9801B
- Language: English Operation
- Index: 4-Open Cassette Type
- Moving Stage: TR
- Spin Unit: SSW (2)
- Spin Unit 2: SSR (2)
- Return Unit: 2 Reverse Units (Notch Type)
SSW Section:
- Spin Chuck: Vacuum Chuck
- Brush Material: PVA or Mohair
- Brush Motor: Brushless Motor
- Nozzles: Brush, Nano Nozzle, DI Rinse Nozzle (2), Back Rinse Nozzle, Brush Clean Nozzle
SSR Section:
- Spin Chuck: Magnetic Chuck
- Brush Material: PVA or Mohair
- Brush Motor: Brushless Motor
- Nozzles: Nano Nozzle, Brush Nozzle, DI Rinse Nozzle (2), Brush Clean Nozzle
2000 Vintage

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