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Plasmatherm 790 RIE-PECVD (Reactive Ion Etcher - Plasma-Enhanced Chemical Vapor Deposition)
Plasmatherm 790 RIE-PECVD (Reactive Ion Etcher - Plasma-Enhanced Chemical Vapor Deposition)

Plasmatherm 790 RIE-PECVD (Reactive Ion Etcher - Plasma-Enhanced Chemical Vapor Deposition)

Asset #: 75057

Make: Plasmatherm

Model: 790

Last Confirm Date: November 09, 2023

Plasmatherm 790 RIE-PECVD (Reactive Ion Etcher - Plasma-Enhanced Chemical Vapor Deposition)
- 200-220 Vac
- 6 process gases
-Blank Anodized aluminum feature plate
- 13.56 MHz RF package
- 360lps turbo pump

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