{"product_id":"74708","title":"Lam \/ Novellus \/ Gasonics Gamma 2130 Photoresist Stripper","description":"Lam \/ Novellus \/ Gasonics Gamma 2130 Photoresist Stripper\u003cbr\u003eSystem Configuration:\u003cbr\u003e- Main System\u003cbr\u003e- Load Port: Brooks Fixload TM V6\u003cbr\u003e- EFEM Robot: 02-169208-00\u003cbr\u003e- Aligner: Yaskawa\u003cbr\u003e- RF Rack: Generator ENI GHW-50A-04 5ea\u003cbr\u003e- UI Panel\u003cbr\u003e- Light Curtain: Keyence\u003cbr\u003e- Signal Cable (RF Cable Included)Process Chamber Configuration:\u003cbr\u003e- GXT type (Upgrade Bell jar and Quartz tube)\u003cbr\u003e- EPD: 4ea(#2,#3,#4,#5 Port)\u003cbr\u003e- RF Matcher: CPMX-3000 5ea\u003cbr\u003e- RF Source: 02-352103-00 5ea\u003cbr\u003e- Load\/Unload Port\u003cbr\u003e- HDIS Pedestal: #2, #3, #,1, #6\u003cbr\u003e- Fixed Pedestal: #4, #5\u003cbr\u003e- Stage #1: Preheat\u003cbr\u003e- Yaskawa Spindle\u003cbr\u003e- Athenta Computer\u003cbr\u003e- UI Computer\u003cbr\u003e- Gate Valve: MDC ISO Valve\u003cbr\u003e- Throttle Valve: NC\u003cbr\u003e- Slit Valve: V-TEX\u003cbr\u003e- Manometor: MKS 10 Torr\u003cbr\u003e- Gas Box: MFC #1 Brooks O2, MFC #2 Brooks N2, MFC #3 Brooks H2N2, MFC #4 Brooks CF4\u003cbr\u003e2003 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44816838951102,"sku":"74708","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1-done-114_9ea512bf-7c2d-44f4-9cb3-7230e99bd7de.jpg?v=1737598482","url":"https:\/\/www.bridgetronic.com\/products\/74708","provider":"Bridge Tronic Global","version":"1.0","type":"link"}