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Lam / Novellus / Gasonics Gamma 2130 Photoresist Stripper

Asset #: 74708

Make: Lam / Novellus / Gasonics

Model: Gamma 2130

Last Confirm Date: October 26, 2023

Lam / Novellus / Gasonics Gamma 2130 Photoresist Stripper
System Configuration:
- Main System
- Load Port: Brooks Fixload TM V6
- EFEM Robot: 02-169208-00
- Aligner: Yaskawa
- RF Rack: Generator ENI GHW-50A-04 5ea
- UI Panel
- Light Curtain: Keyence
- Signal Cable (RF Cable Included)Process Chamber Configuration:
- GXT type (Upgrade Bell jar and Quartz tube)
- EPD: 4ea(#2,#3,#4,#5 Port)
- RF Matcher: CPMX-3000 5ea
- RF Source: 02-352103-00 5ea
- Load/Unload Port
- HDIS Pedestal: #2, #3, #,1, #6
- Fixed Pedestal: #4, #5
- Stage #1: Preheat
- Yaskawa Spindle
- Athenta Computer
- UI Computer
- Gate Valve: MDC ISO Valve
- Throttle Valve: NC
- Slit Valve: V-TEX
- Manometor: MKS 10 Torr
- Gas Box: MFC #1 Brooks O2, MFC #2 Brooks N2, MFC #3 Brooks H2N2, MFC #4 Brooks CF4
2003 Vintage

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