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Lam / SEZ SP 203 Spin Etcher
Lam / SEZ SP 203 Spin Etcher
Lam / SEZ SP 203 Spin Etcher
Lam / SEZ SP 203 Spin Etcher
Lam / SEZ SP 203 Spin Etcher

Lam / SEZ SP 203 Spin Etcher

Asset #: 74661

Make: Lam / SEZ

Model: SP 203

Last Confirm Date: October 20, 2023

Lam / SEZ SP 203 Spin Etcher
- HDD included with software· FFU
- RDM (installed but can be removed)
- Exhaust Up
- Ultrasonic Flowmeter
- 5 x Lauda Heat Exchanger (=max possible)
- Standard Handling 200mm
- N2 / DI included in Med Arm
- Standard Pin Chuck 200mm (NC type)
- Open Cassette
- Shutter
- Front and Rear Keyboard & Display
- 3xCDS Type “E” including RAID controller
- 400V AC
- Transformator if needed
- Chuckdrive / Elevating unit bearings & motors & toothed belts
- Robot controller ESC200
- Brooks robot ATM407B
- ECO Gripper moving parts
- Lauda heat exchangers
- Ionizer spikes
- Chuck Pins
- Some CAN bus modules
- Keyboard and KVM switch
- Partly chemical valves
- SW backup Main Unit & CDS included
2011 Vintage

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