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KLA Surfscan SP 2 Particle Defect System
KLA Surfscan SP 2 Particle Defect System
KLA Surfscan SP 2 Particle Defect System

KLA Surfscan SP 2 Particle Defect System

Asset #: 74652

Make: KLA

Model: Surfscan SP 2

KLA Surfscan SP 2 Particle Defect System
Wafer Size:
- 300mm SEMI Notch
Process:
- BAREINSP
Standard Specifications:
- Windows System: Windows XP SP3
- Main S/W: NGS 5.4 SR3 HF3
Main Computer:
- Intel®Xeon™ CPU 3.20GHz
- 3.5 GB RAM Memory DVD - ROM
- Mouse Keyboard 3.5" Floppy
- NGS application software
2006 Vintage

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