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CHA Mark 40 SR 10 E-Beam Evaporator
CHA Mark 40 SR 10 E-Beam Evaporator
CHA Mark 40 SR 10 E-Beam Evaporator

CHA Mark 40 SR 10 E-Beam Evaporator

Asset #: 74429

Make: CHA

Model: Mark 40 SR 10

Wafer Sizes: 6 inch

Last Confirm Date: October 09, 2023

CHA Mark 40 SR 10 E-Beam Evaporator, 6"
Includes:
- 4 Pocket Electron Beam Gun(Rebuilt), Manual Pocket Rotational
- CHA SR10 Electron Beam Power Supply
- Autotech II Valve Controller
- CTI -8 Cryopump (Rebuilt)
- CTI 8200 Compressor
- Rebuilt 35 CFM Dual Stage Mechanical Pump
- Lift Off Dome for 4” Wafers
- Upgraded with new Thickness Monitor
- Upgraded with new JMI Touch Screen Valve Controller   
- Upgraded 4 Pocket to 6 Pocket Gun

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