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SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)
SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)

SPTS / STS Sigma fxP PVD (Physical Vapor Deposition)

Asset #: 74409

Make: SPTS / STS

Model: Sigma fxP

Wafer Sizes: 6 inch

SPTS / STS Sigma fxP PVD (Physical Vapor Deposition), 6"
- PVD (2), Etch Chamber (1)
- Lordlock Chambers (2)
- Transfer Chamber (1)
- Some broken parts, TMP for Lordlock and Transfer chamber
Configuration(upper floor)
- 2 L/L(VCB),
- 1 Transfer Chamber,
- 2 Depo(Sputter)
- 1 Etch(HSE),
 - 3 Controller Raack
- (AC Power, DC power Supply Vacuum Cont, Controller)
Down Floor
- 2 Cryo Compressor(CTI 9600),
- 4 Dry Pump(SDE90),
- 2 Chiller
- 470VAC Transformer
Failure
- L/L(VCB) Contrtoller
- VCB Bà: Door Close failure and Switching from Rough to Turbo
- Etch CH(HSE)Controller: Switch to Depo A
- ESC for Depo A does not work but new spare ESC available

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