{"product_id":"74337","title":"STS Multiplex ASE ICP Deep Silicon Etcher (Inductively Coupled Plasma)","description":"STS Multiplex ASE ICP Deep Silicon Etcher (Inductively Coupled Plasma), 6\"\u003cbr\u003e- Manual wafer lock\u003cbr\u003e- Low and high frequency ICP (Inductively Coupled Plasma) etch system. \u003cbr\u003e- The ASE (Advanced Silicon Etch) process consists of alternating cycles of etching and protective polymer deposition to achieve high aspect ratios. \u003cbr\u003e- The system can be used for deep Si trench etching of a single 6\" [150mm] substrate\u003cbr\u003e- Pumps are not included","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44816382755006,"sku":"74337","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1-done-24_b389e869-8c6c-4212-ae04-eb572406d54b.jpg?v=1737577858","url":"https:\/\/www.bridgetronic.com\/products\/74337","provider":"Bridge Tronic Global","version":"1.0","type":"link"}