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GCA 6100 C Wafer Stepper
GCA 6100 C Wafer Stepper
GCA 6100 C Wafer Stepper
GCA 6100 C Wafer Stepper
GCA 6100 C Wafer Stepper
GCA 6100 C Wafer Stepper
GCA 6100 C Wafer Stepper
GCA 6100 C Wafer Stepper

GCA 6100 C Wafer Stepper

Asset #: 74103

Make: GCA

Model: 6100 C

Last Confirm Date: September 20, 2023

GCA 6100 C Wafer Stepper
- Maximus 1000 Light Source (350w)
- 150 mm X/Y Stage Travel
- 100 mm AWH1 (Automatic Wafer Handler)
- Lens:  10X g-line (436),   NA=0.28
- Manual Reticle Alignment
- Wafer Alignment Microscope w/ Camera
- HP Laser & HP Laser Compensator w/ probes.
- RZE PC Upgrade Controller (v605.1 Operating System)
- Equipment Overlay Reticles
- Pneumatic Flotation Base
- Climate Control HEPA Chamber (AC not included)
- Equipment Rack: (Top Down)
- Computer Interface Chassis
- RZE PC Upgrade (replaced DEC PDP-11)
- Alignment Monitor & PC Monitor
- Power Control/Joystick/Button Control
- Keyboard shelf
- Stage Control Chassis
- AWH Chassis
- Maximus 1000 Lamp Controller
1985 Vintage

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