{"product_id":"73740","title":"Aixtron G 5 HT MOCVD (Metal Organic Chemical Vapor Deposition)","description":"Aixtron G 5 HT MOCVD (Metal Organic Chemical Vapor Deposition)\u003cbr\u003e- 8X6 Configuration\u003cbr\u003e- Heated exhaust from chamber to filter assembly\u003cbr\u003e- Dual filter assembly Inverted and Phoniex filter \u003cbr\u003e- VAT Throttle Valve\u003cbr\u003e- Extra Pressure sensors for both exhaust streams (Hydride and CL2)\u003cbr\u003e- Internal scrubber switching \u003cbr\u003e- EPITT Version 2 \u003cbr\u003e- EPISON on Dopant MO line plus heating from bubbler to Run\/Vent line\u003cbr\u003e- Ebara ESA100WN process pump \u003cbr\u003e- Two Triscroll pumps: for glovebox and Antechamber\u003cbr\u003e- Aixact version 7.6.2.1\u003cbr\u003e- Process module 208VAC, RF Generator 480VAC\u003cbr\u003e- USA Voltage\u003cbr\u003e- No transfer modules\u003cbr\u003e2014 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44816774529214,"sku":"73740","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/73740","provider":"Bridge Tronic Global","version":"1.0","type":"link"}