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Aixtron G 5 HT MOCVD (Metal Organic Chemical Vapor Deposition)

Asset #: 73740

Make: Aixtron

Model: G 5 HT

Last Confirm Date: August 30, 2023

Aixtron G 5 HT MOCVD (Metal Organic Chemical Vapor Deposition)
- 8X6 Configuration
- Heated exhaust from chamber to filter assembly
- Dual filter assembly Inverted and Phoniex filter 
- VAT Throttle Valve
- Extra Pressure sensors for both exhaust streams (Hydride and CL2)
- Internal scrubber switching 
- EPITT Version 2 
- EPISON on Dopant MO line plus heating from bubbler to Run/Vent line
- Ebara ESA100WN process pump
- Two Triscroll pumps: for glovebox and Antechamber
- Aixact version 7.6.2.1
- Process module 208VAC, RF Generator 480VAC
- USA Voltage
- No transfer modules
2014 Vintage

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