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Tepla 600 Plasma Asher
Tepla 600 Plasma Asher
Tepla 600 Plasma Asher
Tepla 600 Plasma Asher

Tepla 600 Plasma Asher

Asset #: 73497

Make: Tepla

Model: 600

Wafer Sizes: 2, 3, 4, 5, 6, 12 inch

Last Confirm Date: November 06, 2024

Tepla 600 Plasma Asher, up to 6"
- Semi-automatic
- 245mm Diameter Chamber
- 600W RF Power Generator
- Used for photoresist stripping and surface cleaning, as well as etching silicon and its compounds
- Chamber Size: 245mm diameter, 380mm depth
- Chamber Material: ceramic
- ENI RF Generator: 0-600 Watt, 13.56 MHz
- Gases: 4 channels controlled by 4 MFCs
- MFCs: 3 Brooks 5850 MFCs (professional rebuilt and calibrated)
- MFCs: 1 UNIT UFC-8101 MFCs (professional rebuilt and calibrated)
- Computer: on-board, single card computer
- RS 232 interface
- Software: up to 100 programs of 5 steps each can be entered
- Emergency Stop (EMO)
- Leybold D 65 B Vacuum Pump or equivalent (professionally rebuilt)
- Quartz 4" 25 slot cassette
- Quartz 6" 25 slot cassette
- Electrical: 230V, 50/60Hz, 15A, 2kW
- System Refurbishment Includes: New Quartz Chamber, New Magnetron, All Consumables (O-Rings, Seals) Replaced, MFCs Rebuilt and Calibrated, Vacuum Pump Rebuilt, and more
2003 Vintage

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