{"product_id":"73480","title":"EVG 520 Bonder","description":"EVG 520 Bonder, 6\"\u003cbr\u003e- Refurbished\u003cbr\u003e- 50 \/ 60 Hz\u003cbr\u003e- 120 \/ 208 V\u003cbr\u003e- 3 Phase\u003cbr\u003e- Manual wafer load substrate bonder\u003cbr\u003e- Capable of fusion \u0026amp; thermal compression bonding\u003cbr\u003e- Capable of anodic bonding\u003cbr\u003e- High-vacuum capable bond chamber\u003cbr\u003e- Auto opening of bond tool cover\u003cbr\u003e- Windows based control software and operation interface\u003cbr\u003e- Wafer Size: up to 150 mm capable\u003cbr\u003e- Vacuum Chuck: 6\"\/150mm diameter chuck\u003cbr\u003e- Max Bond Force: 7 kN\u003cbr\u003e- Top Side Heater: 550°C max. in 1°C steps\u003cbr\u003e- Bottom Side Heater: 550°C max. in 1°C steps\u003cbr\u003e- Thermoflex 1400 Chiller (or equivalent) \u003cbr\u003e- Temperature uniformity: ± 1,5 %\u003cbr\u003e- Turbo pump and controller\u003cbr\u003e - Roughing pump\u003cbr\u003e- Load \/ unload tool\u003cbr\u003e- System computer, monitor, and keyboard\u003cbr\u003e- Operations Manual","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44816766435518,"sku":"73480","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_99d748b2-bf16-4aba-a02c-57df6f063e2a.jpg?v=1760645785","url":"https:\/\/www.bridgetronic.com\/products\/73480","provider":"Bridge Tronic Global","version":"1.0","type":"link"}