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EVG 520 Bonder
EVG 520 Bonder
EVG 520 Bonder
EVG 520 Bonder

EVG 520 Bonder

Asset #: 73480

Make: EVG

Model: 520

Wafer Sizes: 6 inch

Last Confirm Date: November 06, 2024

EVG 520 Bonder, 6"
- Refurbished
- 50 / 60 Hz
- 120 / 208 V
- 3 Phase
- Manual wafer load substrate bonder
- Capable of fusion & thermal compression bonding
- Capable of anodic bonding
- High-vacuum capable bond chamber
- Auto opening of bond tool cover
- Windows based control software and operation interface
- Wafer Size: up to 150 mm capable
- Vacuum Chuck: 6"/150mm diameter chuck
- Max Bond Force: 7 kN
- Top Side Heater: 550°C max. in 1°C steps
- Bottom Side Heater: 550°C max. in 1°C steps
- Thermoflex 1400 Chiller (or equivalent)
- Temperature uniformity: ± 1,5 %
- Turbo pump and controller
- Roughing pump
- Load / unload tool
- System computer, monitor, and keyboard
- Operations Manual

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