{"product_id":"73037","title":"Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)","description":"Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)\u003cbr\u003e- 60Hz\u003cbr\u003e- 208 VAC, Phase 3\u003cbr\u003e- 50 Amps Max Input\u003cbr\u003e- TEOS Option w End Frame Mounted Gas Pod\u003cbr\u003e- Kit for single TEOS vapor delivery line \u003cbr\u003e- Non-toxic gas line excluding mass flow controller MKS 1179A MFC with viton seals for non-corrosive applications for Argon\u003cbr\u003e- Loadlock soft vent kit VCR \u003cbr\u003e- Remote Emergency OFF switch box (for use with glove boxes, Dual chamber system etc.)\u003cbr\u003eMain System:\u003cbr\u003e- PECVD process chamber for 400°C electrode with single viewport, 100mm pumping port\u003cbr\u003e- PECVD 240mm fixed height heated (ambient to 400°C) aluminum grounded lower electrode, with 3 pin lift (without wafer clamping)\u003cbr\u003e- Electrical heating kit for PECVD process chamber walls\u003cbr\u003e- Pumpdown pipe heating kit (100mm pumping tee)\u003cbr\u003e- Heated foreline kit NW63\u003cbr\u003e- System console 3 frame, PC base unit, 17\" TFT, blue plc, PC2000 single chamber software \u003cbr\u003e- Standard 208V 60Hz System power box\u003cbr\u003e- 300W, 13.56MHz RF Generator \u0026amp; Air-vane capacitor Automatch Unit for PECVD\u003cbr\u003e- 500W, 350kHz-460kHz Generator \u0026amp; Mixing filter to top electrode for dual frequency PECVD\u003cbr\u003e- 2 Torr capacitance manometer\u003cbr\u003e- 100mm pumping tee with 63mm branch to APC and isolation valve for use with PECVD electrodes (94-100-5-400BL and 94-100-5-700BL)\u003cbr\u003e- 8 line (MAX 8 LINES) externally mounted gas pod\u003cbr\u003e- 4 x Non-toxic gas line excluding mass flow controller\u003cbr\u003e- 4 x MKS 1179A MFC with viton seals for non-corrosive applications Item 13 \u0026amp; 14 - For N2, N2O, O2 \u0026amp; CF4\u003cbr\u003e- 2 x Toxic gas line with MFC bypass, excluding mass flow controller\u003cbr\u003e- 2 x MKS 1479A MFC with metal seals for corrosive applications Item 15 \u0026amp; 16 - For SiH4 \u0026amp; NH3\u003cbr\u003e- Gas pod support frame for system frame mounting (end mounted power box layout only)\u003cbr\u003e- Alcatel ADS602P 208V 60Hz dry pump with rootes for PECVD (no purge kit required)\u003cbr\u003e- Integration hardware for ADS6002P dry pump\u003cbr\u003e- Alcatel ADP\/ADS Dry Pump Display\u003cbr\u003e- Foreline trap for high rate PECVD Systems\u003cbr\u003e- Fixed wavelength endpoint detector for PECVD systems (704nm)\u003cbr\u003e- Single wafer automatic insertion load lock including support frame and active priani gauge\u003cbr\u003e- Alcatel ACP15G Load lock dry pump\u003cbr\u003e- Integration hardware for A15CPF rotary pump or ACP15 dry pump, including flexible tubing\u003cbr\u003e- Julabo FC1600T 230V 60Hz 1Ph Heater\/Chiller 0\/80 °C\u003cbr\u003e2011 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44816706076862,"sku":"73037","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1-done-153_d40f09fb-81bd-41b4-a87d-89a21785183d.jpg?v=1739744859","url":"https:\/\/www.bridgetronic.com\/products\/73037","provider":"Bridge Tronic Global","version":"1.0","type":"link"}