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CHA Mark 40 C Evaporator
CHA Mark 40 C Evaporator

CHA Mark 40 C Evaporator

Asset #: 73033

Make: CHA

Model: Mark 40 C

Last Confirm Date: February 20, 2025

CHA Mark 40 C Evaporator
- Process Chamber Dimensions: 26” x 26”
- CHA SR-10 E-Beam Power Supply (10kW)
- CHA T271-4-1 Electron Beam Source
- Crucible: 4 pockets, 15cc each
- CHA Beam Sweep Controller
- CHA Auto Tech-2 Pump Cycle Controller
- Blade Position Controller
- Fixture Control and Shutter Controller
- E.B. Gun Rotation Controller
- RGA Valve Control
- Substrate Heat
- 10kW Heater Power Supply (CHA HPS-671-10)
- Sycon STC-200/SQ Deposition Rate Controller
- Granville Philips 307 Vacuum Gauge Control
- MKS Type 250 Pressure/Flow Controller
- Neslab CFT-150 Chillers, Qty 2
- CTI-Cryogenics 8500 Compressor
- Edwards E2M40 2-Stage Vacuum Pump
- Liquid Nitrogen Level Control
- Ion Gauge Tube: IG-100N
- Convectron Tube: 275-071

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