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STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system
STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system
STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system
STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system
STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system
STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system
STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system
STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system
STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system

STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system

Asset #: 72824

Make: STS

Model: Multiplex ICP ASE

Wafer Sizes: 6 inch

STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system, 6"
- Currently configured for 150 mm wafers
- Manual load lock
- He Backside Cooling 150mm clamp configuration
- ENI 300/30 Watt 13.56MHz RF power supply
- With an ENI ACG-10B 1KW 13.56MHz RF Upper Electrode power supply
- Leybold Mag 2000CT Turbo pump with Leybold Mag Drive Controller
- OnBoard gas panel – 4 MFCs
- MAC Cassette to Cassette Loader can be an option
- 208V, 60Hz, 50A 3 phase
2000 Vintage

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