{"product_id":"7235","title":"Perkin Elmer 4410 Sputtering System","description":"Perkin Elmer 4410 Sputtering System\u003cbr\u003eCustomer programming of recipe for process parameters. \u003cbr\u003eProcess parameters recorded on system computer. \u003cbr\u003eOptional GEM\/SECS II functions. \u003cbr\u003e24V DC control components \u003cbr\u003e\u003cbr\u003eDC gear motors with encoder to run table rotate\/ table \u003cbr\u003eup \u0026amp; down \u003cbr\u003e\u003cbr\u003eDC gear motors run shutters\/pallet carriage moving \u003cbr\u003eVacuum gauge\/vacuum control system \u003cbr\u003eGas control system \u003cbr\u003eRF automatically matching network \u003cbr\u003eDC power \/ RF generator can be mounted in the frame \u003cbr\u003ePlumbing system \u003cbr\u003eCables\/wires harness \u003cbr\u003eHigh rate delta DC magnetron sputtering: Aluminum and \u003cbr\u003ealuminum alloys can be sputter deposited at rates in excess \u003cbr\u003eof 1800 A \/min, with loads of thirty 3\" or thirteen 4\"wafers. \u003cbr\u003e\u003cbr\u003eHigh throughput operation: Automated load lock and \u003cbr\u003econtroller sequences provide for efficient pump-down and \u003cbr\u003epallet transfer to process chamber, maximizing throughput. \u003cbr\u003eHigh uniformity: +\/-7 guaranteed with water-cooledd \u003cbr\u003erotating annular substrate table; +\/-5 achievable. \u003cbr\u003e\u003cbr\u003eThe right sputter mode for each application: Sputter deposit, \u003cbr\u003eDC Megnetion. Optina!: Sputter Etching, Pulse-DC, Bias \u003cbr\u003eSputter, RF Magnetron, RF Diode. \u003cbr\u003e\u003cbr\u003eUltra-clean vacuum: Cryopump and Meissner-trapped \u003cbr\u003eprocess chamber ensures contamination-free conditions \u003cbr\u003eespecially important for critical processes. \u003cbr\u003e\u003cbr\u003eDesigned for operator safety: Two-button operation initiates \u003cbr\u003epump-down and load sequence. Safety interlocks on DC and \u003cbr\u003eRF suppliers . \u003cbr\u003e\u003cbr\u003eEasy maintenance: New Designed removable depositionzl \u003cbr\u003eshields permit easy system cleaning. Automatic cryopump \u003cbr\u003eregeneration minimizes downtime and inconvenience. \u003cbr\u003eEasy wafer loading: Tweezer grooves facilitate wafer loading . \u003cbr\u003eNested pallets are optional. \u003cbr\u003e\u003cbr\u003eA fail-safe system: Water flow switches on cathodes, chamber \u003cbr\u003eand vacuum system automatically shut the system down in \u003cbr\u003ecase of cooling system failure . \u003cbr\u003e","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44806458802366,"sku":"7235","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/7235","provider":"Bridge Tronic Global","version":"1.0","type":"link"}