{"product_id":"7233","title":"AccuSputter AW 4450 Sputtering System","description":"AccuSputter AW 4450 Sputtering System, 3\", 4\"\u003cbr\u003e- Customer programming of recipe for process parameters. \u003cbr\u003e- Process parameters recorded on system computer. \u003cbr\u003e- Optional GEM\/SECS II functions. \u003cbr\u003e-24V DC control components -DC gear motors with encoder to run table rotate\/ table up \u0026amp; down \u003cbr\u003e- DC gear motors run shutters\/pallet carriage moving \u003cbr\u003e- Vacuum gauge\/vacuum control system \u003cbr\u003e- Gas control system \u003cbr\u003e- RF automatically matching network \u003cbr\u003e- DC power \/ RF generator can be mounted in the frame \u003cbr\u003e- Plumbing system \u003cbr\u003e- Cables\/wires harness \u003cbr\u003e- High rate delta DC magnetron sputtering: Aluminum and \u003cbr\u003ealuminum alloys can be sputter deposited at rates in excess \u003cbr\u003eof 1800 A \/min, with loads of thirty 3\" or thirteen 4\" wafers.\u003cbr\u003e- High throughput operation: Automated load lock and controller sequences provide for efficient pump-down and \u003cbr\u003epallet transfer to process chamber, maximizing throughput. \u003cbr\u003e- High uniformity: +\/-7 guaranteed with water-cooled rotating annular substrate table; +\/-5 achievable. \u003cbr\u003e- The right sputter mode for each application: Sputter deposit, \u003cbr\u003eDC Megnetion. Optional: Sputter Etching, Pulse-DC, Bias \u003cbr\u003eSputter, RF Magnetron, RF Diode.\u003cbr\u003e- Ultra-clean vacuum: Cryopump and Meissner-trapped process chamber ensures contamination-free conditions \u003cbr\u003eespecially important for critical processes. \u003cbr\u003e- Designed for operator safety: Two-button operation initiates \u003cbr\u003epump-down and load sequence. \u003cbr\u003e-Safety interlocks on DC and \u003cbr\u003eRF suppliers . \u003cbr\u003e- Easy maintenance: New Designed removable depositional \u003cbr\u003eshields permit easy system cleaning.\u003cbr\u003e- Automatic cryopump \u003cbr\u003eregeneration minimizes downtime and inconvenience. \u003cbr\u003e-Easy wafer loading: Tweezer grooves facilitate wafer loading . \u003cbr\u003e- Nested pallets are optional. A fail-safe system: Water flow switches on cathodes, chamber \u003cbr\u003eand vacuum system automatically shut the system down in \u003cbr\u003ecase of cooling system failure .","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44806458736830,"sku":"7233","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/7233","provider":"Bridge Tronic Global","version":"1.0","type":"link"}