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Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer
Tel Act 8 Coater / Developer

Tel Act 8 Coater / Developer

Asset #: 72257

Make: Tel

Model: Act 8

Wafer Sizes: 8 inch

Tel Act 8 Coater / Developer, 8"
- Left to right
- Wafer and Carrier Type: 4 Foup
- System Power Rating: AC 200/220V, 3-Phase for System
-Software Version: #2
MAIN SYSTEM:
- 2-1, 2-2
- Main frame with system controller
- 4 foup System
- Type: Normal Cassette Type
COATER UNIT:
- 4 dispense nozzle with temperature controlled lines
- PRC pump 4 nozzle
- Rinse Nozzle: back / EBR/ Solvent bath for etch unit
- Rinse System: 3 liter 2 tank Buffer Tank System 2 set
- Degas System: Installed
- Programmable side rinse
- Direct drain type
DEVELOPER UNIT:
- 3-1, 3-2
- PRC nozzle (1 EA) for each unit
- Dev Solution: 3 liter 2 tank Buffer Tank System 2 set
- Degas System: Installed
- Developter temperature control system
- Direct drain
ADHESION UNIT:
- ADH (1 EA)
- Low temp hot plates (LHP) 1EA
- Cup washer holder (CWH) 1EA
- High precision hot plate (PHP) 3 EA
2008 Vintage

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