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AG Associates AW 610 V RTP (Rapid Thermal Process)

Asset #: 7204

Make: AG Associates

Model: AW 610 V

Last Confirm Date: February 23, 2016

AG Associates AW 610 V RTP (Rapid Thermal Process)
Manual Desktop System
Baratron Gauge to read the pressure
Top Tungsten halogen lamps
2 to 4 or 4 to 6 inch wafer size
100-800 °C with Thermocouple
Sensor
10-80 °C/S ramp rate
10-80 °C/S cooling rate
20 Mins@600°C; 10 Mins@ 800°C;
2 Mins@1000°C
2 gas lines with 10 SLM MFCs
3 phase, 50/60Hz, 200/208/380/420
VAC power
Options:
100-1000 °C with Thermocouple and
Patented ERP Pyrometer
3 to 4 gas lines with MFCs
Vacuum pumps
Throttle valve to control the pressure
Atmospheric process function

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