{"product_id":"7202","title":"AG Associates AW 830 RTP System (Rapid Thermal Process)","description":"AG Associates AW 830 RTP System (Rapid Thermal Process)\u003cbr\u003eAutomatic Stand alone System \u003cbr\u003e8 or 12 inch substrate size \u003cbr\u003e100-800°C \u003cbr\u003e10-200 °C\/S ramp rate \u003cbr\u003e10-150 °C\/S cooling rate \u003cbr\u003e40 Mins@600°C; 20 Mins@800°C; \u003cbr\u003e5 Mins@1000°C \u003cbr\u003e2 gas lines with 10 SLM MFCs \u003cbr\u003e3 phase,50\/60Hz, 200\/2081380\/420 \u003cbr\u003eVAC power \u003cbr\u003eOptions: \u003cbr\u003e100-1250 °C with Thermocouple \u0026amp; \u003cbr\u003ePatented ERP Pyrometer \u003cbr\u003e3 to 4 gas lines with MFCs \u003cbr\u003e","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44806457721022,"sku":"7202","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/7202","provider":"Bridge Tronic Global","version":"1.0","type":"link"}