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SUSS MA 6 Mask Aligner
SUSS MA 6 Mask Aligner
SUSS MA 6 Mask Aligner
SUSS MA 6 Mask Aligner
SUSS MA 6 Mask Aligner

SUSS MA 6 Mask Aligner

Asset #: 71995

Make: SUSS

Model: MA 6

Wafer Sizes: 2, 3, 4, 5, 6, 12 inch

SUSS MA 6 Mask Aligner, up to 6"
- Topside (TSA) Alignment
- Gen 2
- Suss Dual Video Microscope DVM6
- Objectives: 5X, 10X, 20X
- UV400 Optics (for 365nm and 405nm exposure)
- CIC 1200 UV Power Supply
- Capable of Proximity, Soft, Hard and Vacuum Contact with proper tooling
- Currently set up with 3 inch Vacuum Contact Alignment Chuck and 4 inch Mask Holder tooling, capable of Vacuum Contact, Hard and Soft Contact
- 350 Watt Lamphouse (can operate w/ 200 Watt or 350 Watt HG UV lamps)
- Incorporated Newport Vibration Isolation Table (for Suss MA6)
- System Power: 230V, 50/60 Hz
- Operations Manual for Suss MA6 Mask Aligner
2001 Vintage

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