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AG Associates AW 610 RTP System (Rapid Thermal Process)

Asset #: 7199

Make: AG Associates

Model: AW 610

Last Confirm Date: February 23, 2016

AG Associates AW 610 RTP System (Rapid Thermal Process)
Manual Desktop System
2 to 4 or 4 to 6 inch wafer size
100-800°C
10-200 °C/S ramp rate
10-150 °C/S cooling rate
60 Mins@600°C; 30 Mins@700°C;
5 Mins@1000°C
1 gas line with 10 SLM MFC
3 phase,50/60Hz, 200/2081380/420
VAC power
Options:
100-1250 °C with Thermocouple
and Patented ERP Pyrometer
2 - 4 or 5 - 6 gas lines with MFCs

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