{"product_id":"71989","title":"KLA Surfscan SP 2 Particle Defect System","description":"KLA Surfscan SP 2 Particle Defect System\u003cbr\u003eProcess: BAREINSP\u003cbr\u003eSTANDARD SPECIFICATIONS:\u003cbr\u003e- Windows System: Windows XP SP3\u003cbr\u003e- Main S\/W: NGS 5.4 SR3 HF3\u003cbr\u003e- Wafer: SEMI Notch\u003cbr\u003eCARRIER:\u003cbr\u003e- 3 AdvanTag SW CID, Phx, Shinko (load port)\u003cbr\u003e- 8 user-configurable LEDs to display the loadport status\u003cbr\u003e- Load\/unload button for manual delivery hand-off\u003cbr\u003e- Cassette \/ wafer mapping which allows the tool to generate a wafer\u003cbr\u003emap of the 300 mm FOUP and detect wafer presence, empty slots and\u003cbr\u003ecross-slotted wafer\u003cbr\u003e- The wafer map can be displayed on the user screen and sent to a SECS\u003cbr\u003ehost\u003cbr\u003eFACILITIES:\u003cbr\u003e- Power: 208 VAC, 3W-N\u003cbr\u003e- CDA: \u0026gt; 28.3 Nl\/min, \u0026gt; 6.6791 kg\/cm2\u003cbr\u003e- Vac: \u0026gt; 28.317 l\/min, \u0026gt; -700 mm Hg\u003cbr\u003eCHAMBER:\u003cbr\u003e- Powder Coat Panels Kit\u003cbr\u003e- 200\/300mm Vacuum option\u003cbr\u003e- Optical Filter\u003cbr\u003e- Load port Vacuum 300mm Dual FIMSAPPLICATION:\u003cbr\u003e- 2mm Edge Exclusion\u003cbr\u003e- Oblique Incidence Illumination (High \/ Standard \/ Low)\u003cbr\u003e- Normal Incidence Illumination (High \/ Standard \/ Low)\u003cbr\u003e- Enhanced XY Coordinates\u003cbr\u003e- IDM SP2\u003cbr\u003e- Standard Classification package\u003cbr\u003e- LPD-N Classification\u003cbr\u003e- LPD-ES classification\u003cbr\u003e- Grading and Sorting\u003cbr\u003e- Spatial Filter (20 degree)\u003cbr\u003e- Spatial Filter (40 degree)\u003cbr\u003e- Spatial filter (rough films)\u003cbr\u003e- Spatial filter (Back)\u003cbr\u003e- High Sensitivity Inspect Mode\u003cbr\u003e- High Throughput Inspect Mode\u003cbr\u003eOPTIONS:\u003cbr\u003e- Haze\u003cbr\u003e- Haze Normalization\u003cbr\u003e- Haze Analysis\u003cbr\u003e- IC\/OEM Mfg Surf Quality Recipe\u003cbr\u003eHARDWARE CONFIGURATION:\u003cbr\u003e-  5 Color Light Tower (RBYGW)\u003cbr\u003eETHERNET:\u003cbr\u003e- NFS Client\u003cbr\u003e- E84 enabled for OHT \u0026amp; AGV\/RGV\u003cbr\u003e- E87 (Based on E39)\u003cbr\u003e- GEM\/SECS and HSMS\u003cbr\u003e- E40\/ E94\/ E90 \/ E116\u003cbr\u003e- Handler Secondary UI, Phoenix, SP2\u003cbr\u003e- Main Computer\u003cbr\u003e- Intel®Xeon™ CPU 3.20GHz\u003cbr\u003e- 3.5 GB RAM Memory\u003cbr\u003e- DVD- ROM\u003cbr\u003e2010 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44816525263038,"sku":"71989","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/3-done-66_15b1f57d-7c22-45d7-86fa-e7603fe2ad8b.jpg?v=1737585981","url":"https:\/\/www.bridgetronic.com\/products\/71989","provider":"Bridge Tronic Global","version":"1.0","type":"link"}