{"product_id":"7198","title":"AG Associates AW 410 RTP System (Rapid Thermal Process)","description":"AG Associates AW 410 RTP System (Rapid Thermal Process)\u003cbr\u003eManual Desktop System \u003cbr\u003e2 to 4 inch wafer size \u003cbr\u003e100-800°C \u003cbr\u003e10-100 °C\/S ramp rate \u003cbr\u003e10-100 °C\/S cooling rate \u003cbr\u003e30 Mins@600°C; 20 Mins@700°C; \u003cbr\u003e5 Mins@1000°C \u003cbr\u003e1 gas line with 10 SLM MFC \u003cbr\u003e3 phase,50\/60Hz, 200\/2081380\/420 \u003cbr\u003eVAC power \u003cbr\u003eOptions: \u003cbr\u003e100-1250 °C with Thermocouple \u0026amp; \u003cbr\u003ePatented ERP Pyrometer \u003cbr\u003e2 - 4 or 5 - 6 gas lines with MFCs \u003cbr\u003e","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44806457589950,"sku":"7198","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/7198","provider":"Bridge Tronic Global","version":"1.0","type":"link"}