KLA Surfscan SP 2 Particle Defect System
- Process: BAREINSP
STANDARD SPECIFICATIONS
- Windows System: Windows XP SP3
- Main S/W NGS 5.4 SR3 HF3
- Wafer: SEMI Notch
CARRIER:
- 3 AdvanTag SW CID, Phx, Shinko (load port)
- 8 user-configurable LEDs to display the loadport status
- Load/unload button for manual delivery hand-off
- Cassette / wafer mapping which allows the tool to generate a wafer
map of the 300mm FOUP and detect wafer presence, empty slots and
cross-slotted wafer.
- The wafer map can be displayed on the user screen and sent to a SECS
host.
FACILITIES:
- Power: 208 VAC, 3W-N
- CDA: > 28.3 Nl/min, > 6.6791 kg/cm2
- Vac: > 28.317 l/min, > -700 mm Hg
CHAMBER:
- Powder Coat Panels Kit
- 200/300mm Vacuum option
- Optical Filter
- Load port Vacuum 300mm Dual FIMS
APPLICATION:
- 2mm Edge Exclusion
- Oblique Incidence Illumination (High / Standard / Low)
- Normal Incidence Illumination (High / Standard / Low)
- Enhanced XY Coordinates
- IDM SP2
- Standard Classification package
- LPD-N Classification
- LPD-ES classification
- Grading and Sorting
- Spatial Filter (20 degree)
- Spatial Filter (40 degree)
- Spatial filter (rough films)
- Spatial filter (Back)
- High Sensitivity Inspect Mode
- High Throughput Inspect Mode
OPTIONS:
- Haze
- Haze Normalization
- Haze Analysis
- IC/OEM Mfg Surf Quality Recipe
- Wafer size. 300mm XY Calibration - - - Wafer with first Article
HARDWARE CONFIGURATION:
- 5 Color Light Tower (RBYGW)
ETHERNET:
- NFS Client
- E84 enabled for OHT & AGV/RGV
- E87 (Based on E39)
- GEM/SECS and HSMS
- E40/ E94/ E90 / E116
- Handler Secondary UI, Phoenix, SP2
Main Computer
- Intel®Xeon™ CPU 3.20GHz
- 3.5 GB RAM Memory
- DVD- ROM
- Mouse
- Keyboard
- 3.5" Floppy
- NGS application software
- FEC computer
- Intel®Pentium®4 CPU
- 512 MB RAM Memory
- HDD not included