ASML Twinscan XT 1250 D Scanner
- with Cymer XLA165
-Track Pre-warning signal (APR)s: APR enabled
- Avoid Track INPUT/OUTPUT conflicts, Raise AS after APRs: Avoid Track
- INPUT/OUTPUT conflicts enabled
- Active wafer release for dry WSs: FALSE
- Safeguard to prevent loading of reticles with too wide or mispositioned pellicles: Disabled
- Continuous clampable wafer table for dry WSs: Absent
- Type of wafer table on chuck 1 & 2 for immersion machines: Zerodur version 1
- Wafer Stage Configurations: Wafer Stage type 2 configuration
- Wafer Carrier Locations: Right
- Wafers per Carriers: 25
- Wafer Mark Sensors: Absent
- Wafer Id Readers: Absent
- Wafer Tracks: Present
- Wafer Stage Types: Dual Chuck
- Wafer Stress Relaxations: FALSE
- Lower Docking Plates: Present
- WS Balance Masss: Stainless Steel
- WH Robot Power Amplifiers: CPM 20
- Wafer Stage Fast Stiff X Move Electronicss: Present
- Wafer Stage Mirror Block Down Electronicss: Present
- Universal Prealignments: Disabled
- Interferometer axis version at exposures: 3 plus 1 axis
- Wafer Handling Pneumaticss: Dedicated
- Wafer Switchs: Absent
- Type of immersion hood for immersions: None
- Specifies chuck1 & 2 layout relev. for Immersions: Chuck does not support immersion
- Specifies chuck1 & 2 configs: Dry
- Specifies chuck1 & 2 versions: not specified
- Changed Short Stroke diff XY controllers: Disabled
- Docking wheels at WH unloads: Present
- Docking plate heights: Low - Immersion Hood versions: Absent
- Carrier Handler Types: Mark I 300 Foup
- Wafer Handling Load & Unload Robot Types: Double Fold Arm, 12 mm Z stroke
- Wafer Handling Store Units: Absent
- Wafer Handler wrt BF Shifted in Zs: Not Shifted
- Reticle streaming lites: Disabled
- Enhancements in Reticle Monitors: no enhancements
- Reticle streaming: Disabled
- Improvements for reticle handlings: Disabled
- Extend IRIS maximum particles scanned to 50000.s: Absent
- Zeroing type for Encoders Measurement Systems: Using extra hall sensors for zeroing
- Reticle Stage Chuck Types: Glued Leafspring, TYPE_2: Glued LS, Pneum. GC, IFM / ENC Nitrogen purging of Reticle Stages: RS is not purged
- Reticle Carrier Locations: Right
- Integrated Reticle Inspection Systems: PPD1 with IRIS1 functionality
- Integrated Reticle Librarys: IRL with original functionality
- Reticle Sizes: 6 inch
- Reticle Carrier Tag Readers: Present
- Reticle Stage Long Stroke Motor Types: Cobalt Ferro 18 teeth
- Reticle Stage Long Stroke Configs: TYPE_3:CoFe_18 motor, SB controlled, int. vacuum supply, pneum GC
- Automated Reticle Transport Systems: Absent
- Reticle Stage Lenscooler Boxes: Lenscooler Box with anti-aliasing Filter
- Maximum Reticle ID Lengths: 24 Characters
- Reticle Stage Measurement System on Scans: Heidenhain Encoders
- Relative direction of ws to rs on the X axiss: Same
- RS Object Fields: Normal
- Reticle exchange types: Retex option: E