{"product_id":"71305","title":"PVA TePla Giga 690 Microwave Plasma System","description":"PVA TePla Giga 690 Microwave Plasma System\u003cbr\u003eWith:\u003cbr\u003ePROCESS CHAMBER:\u003cbr\u003e - Material Aluminum\u003cbr\u003e - Volume 91 liters\u003cbr\u003e - Inner dimensions 450 x 450 x 450 mm\u003cbr\u003e - No RF- electrodes inside chamber\u003cbr\u003eVACUUM SYSTEM:\u003cbr\u003e - Vacuum connection DN 63 ISO K\u003cbr\u003e - Process gas control 2 gas channels standard,\u003cbr\u003e - each with MFC and solenoid valve\u003cbr\u003e - Base pressure Approx. 2 x 10-2 mbar\u003cbr\u003e - Process pressure Approx. 0.2–2 mbar\u003cbr\u003e - Evacuation time Approx. 1 minute\u003cbr\u003e - Vacuum gauge Capacitance manometer,\u003cbr\u003e - 10-2 to 10 mbar\u003cbr\u003e - Venting Solenoid valve\u003cbr\u003ePERFORMANCE DATA:\u003cbr\u003e - Uptime \u0026gt;95%\u003cbr\u003e - MTBF \u0026gt;500 h\u003cbr\u003e - MTTR \u0026lt;2 h\u003cbr\u003eSYSTEM CONTROL:\u003cbr\u003e - Hardware PC based system controller\u003cbr\u003e - 10,4″ monitor, GUI\u003cbr\u003e - Light Tower system status r\/g\/y\u003cbr\u003e - Software Realtime Operating System QNX\u003cbr\u003e - Manual and automatic system control\u003cbr\u003emultiple recipe storage\u003cbr\u003e - Process recipe up to 100 recipes\u003cbr\u003ewith 1-10 steps each\u003cbr\u003e - System selftest routine,\u003cbr\u003ewarnings error message dialog\u003cbr\u003e - Soft- and hardware safety interlocks,\u003cbr\u003eoptical plasma intensity monitoring\u003cbr\u003eSUPPLIES:\u003cbr\u003e - Electricity 230 V, single-phase, 15 A, 50\/60 Hz\u003cbr\u003e - Process gas 1\/4“ Swagelok connector,\u003cbr\u003e - input pressure 1–2 bar\u003cbr\u003e - Compressed air 1\/4“ Swagelok connector,\u003cbr\u003e - input pressure 4–6 bar\u003cbr\u003ePLASMA SOURCE:\u003cbr\u003e - Microwave Generator\u003cbr\u003e - Frequency 2.45 GHz\u003cbr\u003e - Adjustable magnetron, air-cooled,\u003cbr\u003e - proprietary antenna and coupling geometry\u003cbr\u003e - Power 0–1.000 W\u003cbr\u003eOPTIONS:\u003cbr\u003e - Pumping system Vacuum pump system comprising\u003cbr\u003erotary vane pump or combination of\u003cbr\u003erotary vane pump and 250 m3\/h\u003cbr\u003e(145 cfm) rootsblower,\u003cbr\u003e400 V, 3 phase, 32 A max.\u003cbr\u003e - Rotary platform Aluminum, 400 mm Ø\u003cbr\u003e - Gas channels 3–4\u003cbr\u003eECR setup\u003cbr\u003e- without dry pump\u003cbr\u003e2015 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44816453959870,"sku":"71305","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/4-done-16_62ac3c39-bd47-48aa-adda-dfb4eb67fdcf.jpg?v=1737582124","url":"https:\/\/www.bridgetronic.com\/products\/71305","provider":"Bridge Tronic Global","version":"1.0","type":"link"}