PVA TePla Giga 690 Microwave Plasma System
With:
PROCESS CHAMBER:
- Material Aluminum
- Volume 91 liters
- Inner dimensions 450 x 450 x 450 mm
- No RF- electrodes inside chamber
VACUUM SYSTEM:
- Vacuum connection DN 63 ISO K
- Process gas control 2 gas channels standard,
- each with MFC and solenoid valve
- Base pressure Approx. 2 x 10-2 mbar
- Process pressure Approx. 0.2–2 mbar
- Evacuation time Approx. 1 minute
- Vacuum gauge Capacitance manometer,
- 10-2 to 10 mbar
- Venting Solenoid valve
PERFORMANCE DATA:
- Uptime >95%
- MTBF >500 h
- MTTR <2 h
SYSTEM CONTROL:
- Hardware PC based system controller
- 10,4″ monitor, GUI
- Light Tower system status r/g/y
- Software Realtime Operating System QNX
- Manual and automatic system control
multiple recipe storage
- Process recipe up to 100 recipes
with 1-10 steps each
- System selftest routine,
warnings error message dialog
- Soft- and hardware safety interlocks,
optical plasma intensity monitoring
SUPPLIES:
- Electricity 230 V, single-phase, 15 A, 50/60 Hz
- Process gas 1/4“ Swagelok connector,
- input pressure 1–2 bar
- Compressed air 1/4“ Swagelok connector,
- input pressure 4–6 bar
PLASMA SOURCE:
- Microwave Generator
- Frequency 2.45 GHz
- Adjustable magnetron, air-cooled,
- proprietary antenna and coupling geometry
- Power 0–1.000 W
OPTIONS:
- Pumping system Vacuum pump system comprising
rotary vane pump or combination of
rotary vane pump and 250 m3/h
(145 cfm) rootsblower,
400 V, 3 phase, 32 A max.
- Rotary platform Aluminum, 400 mm Ø
- Gas channels 3–4
ECR setup
- without dry pump
2015 Vintage