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CXN-100 Wafer Scanner
CXN-100 Wafer Scanner

CXN-100 Wafer Scanner

Asset #: 70254

Make: -

Model: CXN-100

Wafer Sizes: 4, 5, 6, 8 inch

Last Confirm Date: January 06, 2025

CXN-100 Wafer Scanner, 4", 5", 6", 8"
- Single wafer measurements
- XY Scan, Bare Silicon Surface Inspection
- Manual load/un-load
- Table-top workspace with basic utilities (power, vacuum)
- Simple utilities: power, vacuum, network
- User interface and scan controls on USB connected computer
- 115VAC @ 3amp, house vacuum and temperature-controlled cleanroom environment
- Sensitivity: 0.22um (PSL equivalent)
- Size Channels: 0.22um, 0.3um, 0.5um, 1.0um, 3.0um and 5.0um+
- Repeatability: < 5% variability of mean

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