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OCLI M 1044 Sputtering System
OCLI M 1044 Sputtering System
OCLI M 1044 Sputtering System
OCLI M 1044 Sputtering System
OCLI M 1044 Sputtering System
OCLI M 1044 Sputtering System
OCLI M 1044 Sputtering System
OCLI M 1044 Sputtering System

OCLI M 1044 Sputtering System

Asset #: 69695

Make: OCLI

Model: M 1044

Last Confirm Date: February 24, 2023

OCLI M 1044 Sputtering System
- The driver for drum rotation is broken
- The holder are 180mm x1380
- Vacuum chamber: original and functional chamber with four spattering source.
- 4 Turbomolecular pump Pfeiffer with power suppliers.
- 2 Pinnacle 12KW Ion Gun
- Bias Voltage suppliers
- 3 DC engines
- 3 Drives
- PLC Honeywell
- 6 DC Power supply 3+3 Master/Slave 20KW/10KW
- 2 Sparc-le 20 for Si target 1+1 Master/Slave
- 2 Multi gas controller MKS 647B
- 3 Magnetron sputtering
- 1 Stabil-Ion® Controller ( power suppliers and controller)
- Vacuum sensor Granville-Phillips Series 370
- Granville Phillips vacuum gauge
- MKS mass flow controller (different type from 100 to 1000sccm)
- 2 PC & 1 Monitor
- 2 source Bias Voltage
- VAT gate and actuators
- 3 Display MDX
- 2 Display Pinnacle
- Frame for parts handling
- Some spare parts available

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