{"product_id":"68137","title":"Aviza OMEGA I 2 L ICP Etcher (Inductively Coupled Plasma)","description":"Aviza OMEGA I 2 L ICP Etcher (Inductively Coupled Plasma)\u003cbr\u003e- BCI3 \u0026amp; CI2 fixed detector\u003cbr\u003e- NH3 fixed detector\u003cbr\u003e- Dry scrubber: 6t 2-slot catalyst barrel that can handle 2 types of gas\u003cbr\u003e- ATH1300M ICP turbo pump upgrade\u003cbr\u003e- 200 PIN ESC TI-200 Micron Assy\u003cbr\u003eParts:\u003cbr\u003e- AE1513 RF generator (2)\u003cbr\u003e- Betta Tech CU700 chiller\u003cbr\u003e- Adixen ADP122LM dry pump\u003cbr\u003e- Adixen ADD122P dry pump \u003cbr\u003e- Adixen ADS602H dry pump \u003cbr\u003e- SPTS Omega FXP HF bias M.U RF match unit \u003cbr\u003e- MKS HEBP pressure controller\u003cbr\u003e- Watlow CLS204 heater controller (2) \u003cbr\u003e- APC Smart-UPS 3000 UPS \u003cbr\u003e- ICP Chamber ceramic wall\u003cbr\u003e- DC PC104 PSU \u003cbr\u003e- Consumable parts\u003cbr\u003e2007 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44816020766910,"sku":"68137","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/Picture7-done-1_b4bd60f1-e06c-44ff-9043-793960b87970.jpg?v=1737568618","url":"https:\/\/www.bridgetronic.com\/products\/68137","provider":"Bridge Tronic Global","version":"1.0","type":"link"}