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Trion Titan Loadlock Plasma Deposition System
Trion Titan Loadlock Plasma Deposition System
Trion Titan Loadlock Plasma Deposition System
Trion Titan Loadlock Plasma Deposition System
Trion Titan Loadlock Plasma Deposition System
Trion Titan Loadlock Plasma Deposition System

Trion Titan Loadlock Plasma Deposition System

Asset #: 67623

Make: Trion

Model: Titan

Wafer Sizes: 3 inch

Last Confirm Date: October 11, 2022

Trion Titan Loadlock Plasma Deposition System, 3"
- Without dry pumps and lower electrode chiller
- PLC and touch screen control
- Active substrate temperature control
- Vacuum casette elevator
- Turbo pump: Edwards STPA 1303 C
- Neslab chillers

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