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KLA UV 1050 Thin Film Measurement System
KLA UV 1050 Thin Film Measurement System

KLA UV 1050 Thin Film Measurement System

Asset #: 67521

Make: KLA

Model: UV 1050

Wafer Sizes: 8 inch

Last Confirm Date: October 06, 2022

KLA UV 1050 Thin Film Measurement System, 8"
- Open cassette base (2)
- Operation interface: Trackball and keyboard standard
PC configuration:
- CPU: 66MHz
- Memory: 64M
- OS: Windows NT4.0 environment
- Application software: SUMMIT 2.3
- GEM/SECS: Enhanced SECSII
Facilities
- Vacuum: 20” (510 mm) Hg @ 1 SCFM - Air: Minimum 80-100 psi - Exhaust Vent and Fittings:
- (150 mm) diameter, flexible hose, pulling 260 cubic feet per minute
- Power: 1 Phase 120V VAC,50/60 Hz
1995 Vintage

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