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ASML Twinscan XT 2 1700 Fi Scanner
ASML Twinscan XT 2 1700 Fi Scanner
ASML Twinscan XT 2 1700 Fi Scanner
ASML Twinscan XT 2 1700 Fi Scanner
ASML Twinscan XT 2 1700 Fi Scanner

ASML Twinscan XT 2 1700 Fi Scanner

Asset #: 66720

Make: ASML

Model: Twinscan XT 2 1700 Fi

Wafer Sizes: 8 inch

ASML Twinscan XT 2 1700 Fi Scanner, 8"
- 45nm Volume Production
- Software release - 5.0.0
- Power - 400volts
- Wafer Size - 200mm
- Wafer Type - Notch
- Lase Model - Cymer XL-360 (60w)
- Laser type - Cymer laser
- OIU/Reticle - RightConfiguration
- Chemical sampling port
- WaterCooling for El. Cabinet
- Universal Prealignement
- Wafer Track Interface - DNS RF3/200
- WH carrier interface - 25 wafer open cassette kit
- Mark sensor (WH opt.prealigner)
- Integrated Reticle Library
- IRIS 6-inches reticle
- Recipe Creator
- EFESE
- Dose Mapper standard
- Polarization metrology module
- Image tuner
- Grid Mapper
- AGILE
- LithoCruiser

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