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SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber
SCREEN / DNS WS 820 L Wafer Scrubber

SCREEN / DNS WS 820 L Wafer Scrubber

Asset #: 66097

Make: SCREEN / DNS

Model: WS 820 L

Wafer Sizes: 8 inch

Last Confirm Date: June 28, 2022

SCREEN / DNS WS 820 L Wafer Scrubber, 8"
- Automated Alpha Tool (Double Sided Porous Silicon: 25 wafer batch)
- Wafer Flow Left to right
- Cassette included
Components to include:
- Main body
- Loader / Unloader
- Two robots for bath to bath transfer systems – one robot for wet wafers and one for dry; Robot arms to be Teflon coated quartz - 2 units
- Double Sided Porous Silicon bath – 1 unit
- Electrical Breaker Box for U.S. safety regulation
- CD ROM Manuals
- Material is FM-PVC to meet FM4910 criteria
System description:
- Position 1 : Loader (CTC type)
- Position 2 : CHCL (Robot Chuck Clean)
- Position 3 : PS (Single-Double Sided Porous Silicon bath)
- Position 4 : QDR (Quick Dump Rinse)
- Position 5 : SD (Spin Dryer)
- Position 6 : Unloader (CTC type)
Other components:
- Notch Aligner
- Wafer Counter
- IPA replenishment function for PS bath(w/ anti explosion)
- HF49% replenishment function for PS bath
- Fire extinguisher system for PS bath
2011 Vintage

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