{"product_id":"66085","title":"Plasmatherm SLR 720 RIE (Reactive Ion Etcher)","description":"Plasmatherm SLR 720 RIE (Reactive Ion Etcher), 8\"\u003cbr\u003e- Single load-locked chamber\u003cbr\u003e- Turbo Pump\u003cbr\u003e- AEI\/RFPP RF5S 500W RF Generator\u003cbr\u003e- Leybold Trivac D65BCS Vacuum Pump\u003cbr\u003e- Leybold Trivac D25BCS Vacuum Pump\u003cbr\u003e- Neslab HX-75 Recirculating Chiller\u003cbr\u003e- Power Box\u003cbr\u003e- Process Software\u003cbr\u003e- Computer upgraded in 2011 by OEM \/ runs Win 98\u003cbr\u003e- Set of Operation and Maintenance Manuals\u003cbr\u003e- 4 MFCs: SF6, N2, CHF3, O2","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815861416126,"sku":"66085","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1-31_0b98aa2e-5d56-4a7f-bcb1-5d78f3190568.jpg?v=1737562887","url":"https:\/\/www.bridgetronic.com\/products\/66085","provider":"Bridge Tronic Global","version":"1.0","type":"link"}