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Plasmatherm SLR 720 RIE (Reactive Ion Etcher)
Plasmatherm SLR 720 RIE (Reactive Ion Etcher)

Plasmatherm SLR 720 RIE (Reactive Ion Etcher)

Asset #: 66085

Make: Plasmatherm

Model: SLR 720

Wafer Sizes: 8 inch

Last Confirm Date: October 07, 2024

Plasmatherm SLR 720 RIE (Reactive Ion Etcher), 8"
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- Set of Operation and Maintenance Manuals
- 4 MFCs: SF6, N2, CHF3, O2

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