{"product_id":"65491","title":"AET Gemini 3 E EPI Reactor (Epitaxial Silicon Deposition)","description":"AET Gemini 3 E EPI Reactor (Epitaxial Silicon Deposition), 4\", 5\", 6\"\u003cbr\u003e- Dual Chamber\u003cbr\u003e- Main body power: 220V, 1 Phase, 40A, electric power 8.8kva\u003cbr\u003e- RF generator power: 460V, 3 phase, electric power: 184kva\u003cbr\u003e- Scrubber power 220V, 1 phase, electric power 9kva\u003cbr\u003e- Cooling water inlet\u003cbr\u003e- Cooling water outlet\u003cbr\u003e- N2, H2, TCS, PH3, HCI\u003cbr\u003e- Acid exhaust, general exhaust","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815788081342,"sku":"65491","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/Picture19_75b265e9-8547-4465-ba10-5a2a4b76b954.jpg?v=1739703872","url":"https:\/\/www.bridgetronic.com\/products\/65491","provider":"Bridge Tronic Global","version":"1.0","type":"link"}