{"product_id":"65490","title":"AET Gemini 3 E EPI Reactor (Epitaxial Silicon Deposition)","description":"AET Gemini 3 E EPI Reactor (Epitaxial Silicon Deposition), 4\", 5\", 6\"\u003cbr\u003e- Dual Chamber\u003cbr\u003e- Main body power: 220V, 1 Phase, 40A, electric power 8.8kva\u003cbr\u003e- RF generator power: 460V, 3 phase, electric power: 184kva\u003cbr\u003e- Scrubber power 220V, 1 phase, electric power 9kva\u003cbr\u003e- Cooling water inlet\u003cbr\u003e- Cooling water outlet\u003cbr\u003e- N2, H2, TCS, PH3, HCI\u003cbr\u003e- Acid exhaust, general exhaust","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815787753662,"sku":"65490","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/10-2_e00530a2-5284-46a0-b6ec-6ef46cb48f43.jpg?v=1739703856","url":"https:\/\/www.bridgetronic.com\/products\/65490","provider":"Bridge Tronic Global","version":"1.0","type":"link"}