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Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher
Applied Materials SNNF Centura Etcher

Applied Materials SNNF Centura Etcher

Asset #: 65461

Make: Applied Materials

Model: SNNF Centura

Applied Materials SNNF Centura Etcher
- 208 50/60hz Centura Controller
- System Controller
- Narrow body loadlocks 0010-75005
- HP robot with metal blade
- Transfer chamber lift
- Endpoint with four monochromators (not mounted)
- Smoke and water leak detect
- Independent Helium cooling
- Seriplex Gas Panel with top feed exhaust
- Seriplex match control
- Wafer mapping
- Wafer on blade sensors
- Umbilicals
- 4 Chambers
Chamber A:
- DPS R0 Poly, w/1110-01043 Source
- RF match AZX 90
- Dual manometers with .1Torr and 10Torr Heads
- Backside Helium Cooling
- 200mm Cathode
- Osaka TG2003M Turbo
Chamber B:
- Poly Etch: Mark II 3 Piece Chamber
- Mark II Shields
- MxP Magnets
- ESC Cathode
- Phase IV RF Match
- Alcatel 5402 CTS Turbo
Chamber C:
- Poly Etch: Uni-Body Chamber
- MxP Shields
- MxP Magnets
- ESC Cathode
- Phase IV RF Match
- Alcatel 5402 CTS Turbo
Chamber D:
- DPS R1 Metal/Deep Trench Etch
- Source RF Match w/AZX-90 Upgrade
- Dual Manometers with .1Torr and 10Torr Heads
- VAT Throttling Gate Valve
- Heated Pump Stack
- 200mm Cathode SNNF ESC
- Alcatel ATH 1300M Turbo
Chamber E:
- Wafer Orienter
- 200mm Lift Hoop
- 200mm Pedestal
- Laser, & CCD Array
Chamber F
- Wafer Orienter
- 200mm Lift Hoop
- 200mm Pedestal
- Laser
- CCD Array
1997 Vintage

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