{"product_id":"65103","title":"Mustang Vacuum Tribo - Si Production Scale Plasma Enhanced Magnetron Sputtering System (PEMS)","description":"Mustang Vacuum Tribo - Si Production Scale Plasma Enhanced Magnetron Sputtering System (PEMS)\u003cbr\u003e- Water cooled stainless steel chamber\u003cbr\u003e- Active coating area: 36” diameter x 30” tall (5”x36” target)\u003cbr\u003e- 4x sputtering cathodes with unbalancing coils and shutters\u003cbr\u003e- 4x Advanced Energy DC power supplies (30 kW)\u003cbr\u003e- Pulsed DC AE Solvix substrate bias\u003cbr\u003e- Liquid (1) and gas (4) independent mass flow controls\u003cbr\u003e- Tier 1 gauges and sensors\u003cbr\u003e- Skid mounted (15’ x 25’ x 10’)\u003cbr\u003e- 8x secondary plasma filaments and power supplies\u003cbr\u003e- 2x mag lev turbo molecular pumps (2000 L\/s) with gate valves\u003cbr\u003e- Dry mechanical pump.\u003cbr\u003e- 2x chamber heaters with 24 kW max power.\u003cbr\u003e- 5 kW AC glow discharge and load match (AE PE2)\u003cbr\u003e- Fixture loading cart\u003cbr\u003e- Allen Bradley PLC with recipe based processing\u003cbr\u003e- Floating (bias capable) planetary substrate holders (2)\u003cbr\u003e2016 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815744958654,"sku":"65103","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/8-done-9_bde20383-28f5-47ae-92a3-d0efd3b45815.jpg?v=1737557453","url":"https:\/\/www.bridgetronic.com\/products\/65103","provider":"Bridge Tronic Global","version":"1.0","type":"link"}